The electron-impact ionization cross sections of atoms and molecuels are calculated by Binary-Encounter-Bethe (BEB), Deutsch-Märk (DM), and combined methods.
| Species | Ionization energy (eV) | |||
|---|---|---|---|---|
| DFT | EPT | CBS-QB3 | Exp. | |
| C3F6 | 9.396 | 12.194 | 11.011 | / |
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